Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 21, Issue 10, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/21/10/105024
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Funding
- NIH HHS [DP2 OD006458, DP2 OD006458-01] Funding Source: Medline
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We present a high-numerical aperture, doublet microlens array for imaging micron-sized objects. The proposed doublet architecture consists of glass microspheres trapped on a predefined array of silicon microholes and covered with a thin polymer layer. A standard silicon microfabrication process and a novel fluidic assembly technique were combined to obtain an array of 56 mu m diameter microlenses with a numerical aperture of similar to 0.5. Using such an array, we demonstrated brightfield and fluorescent image formation of objects directly on a CCD sensor without the use of intermediate lenses. The proposed technology is a significant advancement toward the unmet need of inexpensive, miniaturized optical modules which can be further integrated with lab-on-chip microfluidic devices and photonic chips for a variety of high-end imaging/detection applications.
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