Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 21, Issue 2, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/21/2/027003
Keywords
-
Categories
Funding
- German Research Foundation (DFG) within the collaborative research center [SFB 613]
Ask authors/readers for more resources
We report on an efficient high throughput method for the photolithographic fabrication of well-defined arbitrarily shaped SU-8 microparticles without a sacrificial release layer. The procedure eliminates the spincoating of a sacrificial layer otherwise needed for particle lift-off, thereby reducing processing time and costs. Statistical analysis of the size distribution revealed a standard deviation of less than 2.3% in size. The particles can be immediately released into aqueous solution. This allows for anisotropical functionalization of the particles with, for example, biological loads or elements of molecular recognition after the development of the SU-8 structures.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available