Development of patterned carbon nanotubes on a 3D polymer substrate for the flexible tactile sensor application

This study reports an improved approach to implement a carbon nanotube (CNT)-based flexible tactile sensor, which is integrated with a flexible print circuit (FPC) connector and is capable of detecting normal and shear forces. The merits of the presented tactile sensor by the integration process are as follows: (1) 3D polymer tactile bump structures are naturally formed by the use of an anisotropically etched silicon mold; (2) planar and 3D distributed CNTs are adopted as piezoresistive sensing elements to enable the detection of shear and normal forces; (3) the processes of patterning CNTs and metal routing can be easily batch fabricated on rigid silicon instead of flexible polymer; (4) robust electrical routing is realized using parylene encapsulation to avoid delamination; (5) patterned CNTs, electrical routing and FPC connector are integrated and transferred to a polydimethylsiloxane (PDMS) substrate by a molding process. In application, the CNT-based flexible tactile sensor and its integration with the FPC connector are implemented. Preliminary tests show the feasibility of detecting both normal and shear forces using the presented flexible sensor.