Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 12, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/20/12/125010
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Funding
- Korea Ministry of Knowledge Economy [10032145]
- National Research Foundation of Korea [2010-0003973]
- Korea Research Council Industrial Science and Technology [B551179-10-01-00]
- US National Science Foundation [CMMI 0700827]
- Korea Evaluation Institute of Industrial Technology (KEIT) [10032145] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
- Ministry of Education, Science & Technology (MoST), Republic of Korea [KIOST] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
- National Research Foundation of Korea [2007-331-D00053, 2010-0003973] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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Inkjet printing of functional materials is a key technology toward ultra-low-cost, large-area electronics. We demonstrate low-temperature 3D micro metal structure fabrication by direct inkjet printing of metal nanoparticles (NPs) as a versatile, direct 3D metal structuring approach representing an alternative to conventional vacuum deposition and photolithographic methods. Metal NP ink was inkjet-printed to exploit the large melting temperature drop of the nanomaterial and the ease of the NP ink formulation. Parametric studies on the basic conditions for stable 3D inkjet printing of NP ink were carried out. Furthermore, diverse 3D metal microstructures, including micro metal pillar arrays, helices, zigzag and micro bridges were demonstrated and electrical characterization was performed. Since the process requires low temperature, it carries substantial potential for fabrication of electronics on a plastic substrate.
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