Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 12, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/20/12/125029
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Funding
- Wyss Institute
- National Science Foundation [DMR-0820484]
- Direct For Mathematical & Physical Scien
- Division Of Materials Research [820484] Funding Source: National Science Foundation
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A hyperelastic pressure transducer is fabricated by embedding silicone rubber with microchannels of conductive liquid eutectic gallium-indium. Pressing the surface of the elastomer with pressures in the range of 0-100 kPa will deform the cross-section of underlying channels and change their electric resistance by as much as 50%. Microchannels with dimensions as small as 25 mu m are obtained with a maskless, soft lithography process that utilizes direct laser exposure. Change in electrical resistance is measured as a function of the magnitude and area of the surface pressure as well as the cross-sectional geometry, depth and relative lateral position of the embedded channel. These experimentally measured values closely match closed-form theoretical predictions derived from plane strain elasticity and contact mechanics.
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