4.4 Article

Wafer-level assembly and sealing of a MEMS nanoreactor for in situ microscopy

Related references

Note: Only part of the references are listed.
Article Engineering, Electrical & Electronic

A MEMS Reactor for Atomic-Scale Microscopy of Nanomaterials Under Industrially Relevant Conditions

J. Fredrik Creemer et al.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2010)

Review Engineering, Electrical & Electronic

Wafer level packaging of MEMS

Masayoshi Esashi

JOURNAL OF MICROMECHANICS AND MICROENGINEERING (2008)

Article Microscopy

Atomic-scale electron microscopy at ambient pressure

J. F. Creemer et al.

ULTRAMICROSCOPY (2008)

Review Materials Science, Multidisciplinary

An environmental transmission electron microscope for in situ synthesis and characterization of nanomaterials

R Sharma

JOURNAL OF MATERIALS RESEARCH (2005)

Article Engineering, Electrical & Electronic

Low-temperature wafer bonding: A study of void formation and influence on bonding strength

XX Zhang et al.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2005)

Article Engineering, Chemical

Microreactor technology: A revolution for the fine chemical and pharmaceutical industries?

DM Roberge et al.

CHEMICAL ENGINEERING & TECHNOLOGY (2005)

Article Chemistry, Applied

Application of microreactor technology in process development

XN Zhang et al.

ORGANIC PROCESS RESEARCH & DEVELOPMENT (2004)

Article Engineering, Electrical & Electronic

Etch rates for micromachining processing - Part II

KR Williams et al.

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS (2003)

Review Engineering, Chemical

Technology and applications of microengineered reactors

A Gavriilidis et al.

CHEMICAL ENGINEERING RESEARCH & DESIGN (2002)

Article Engineering, Chemical

Microreactors, a new efficient tool for optimum reactor design

O Wörz et al.

CHEMICAL ENGINEERING SCIENCE (2001)

Article Materials Science, Coatings & Films

Modeling a microfluidic system using Knudsen's empirical equation for flow in the transition regime

JK Robertson et al.

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS (2001)

Article Engineering, Chemical

Microreaction engineering - is small better?

KF Jensen

CHEMICAL ENGINEERING SCIENCE (2001)

Article Engineering, Electrical & Electronic

Wafer bonding of silicon wafers covered with various surface layers

M Wiegand et al.

SENSORS AND ACTUATORS A-PHYSICAL (2000)

Article Engineering, Chemical

Design issues for membrane-based, gas phase microchemical systems

DJ Quiram et al.

CHEMICAL ENGINEERING SCIENCE (2000)