Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 20, Issue 2, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/20/2/025023
Keywords
-
Categories
Funding
- Agence Nationale de la Recherche [SPINJECT ANR-06-BLAN-0253-01]
Ask authors/readers for more resources
A proof-of-concept fluidic assembly of a hybrid MEMS GaAs microcantilever spin injector is presented here. Instead of monolithically forming MEMS from pre-deposited layers, we fabricate a hybrid MEMS by assembling pre-fabricated parts. Sub-millimetre sized patches of GaAs having a thickness of 3 mu m are pre-fabricated, as is a metalized fused silica support layer. The GaAs patches are manipulated and assembled onto the silica support using capillary forces; the resultant hybrid MEMS comprises a GaAs microcantilever on a robust fused silica support. A novel ohmic contact is demonstrated by bonding a GaAs patch (p-type carbon doped to 1 x 10(18) cm(-3)) onto the pre-metalized silica support layer prior to annealing; measurements revealed ohmic behaviour and a specific contact resistivity of similar to 10(-5) Omega cm. Preliminary investigations show that, when contacting the cantilever against a metallic or magnetic surface, injected photocurrents as large as several tens of nA can be obtained, for which the spin polarization is equal to 16%.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available