Fabrication, characterization and modelling of electrostatic micro-generators

This paper presents an electrostatic energy-harvesting device for electrical energy extraction from vibrations. We successfully fabricated prototypes of completely packaged micro-generators with a chip size of 5 mm by 6 mm. This was achieved using a modified SOI technology developed for inertial sensors at HSG-IMIT. Micro-generators produce a maximum rms power of 3.5 mu W when they are excited at their resonance frequency with an input excitation of 13 g. During a long-term experiment over a period of 2 h, the electrostatic energy harvester generated a total net energy of 13.38 mJ corresponding to an average power of 1.58 mu W. The effect of mechanical stoppers and the bias voltage on the generated power is also evaluated. In order to get a more profound understanding of the dynamic behaviour of the micro-generator, we have developed a signal-flow model for numerical simulation of the electrostatic transducer on system level. This model includes a mechanical and an electrical domain which are coupled by electrostatic forces. The limited displacement of the proof mass is also considered using an elastic stopper model. We show that the numerical model is capable of providing good predictions of the device behaviour.