Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 19, Issue 9, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/19/9/094002
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We developed an electrostatic micro power generator for low-frequency energy harvesting applications. This micro power generator consists of a new vibration structure and a new electret structure (stripe masked electret). The advantage of this micro power generator is the high power generation structure of both the controlled gap between electrodes and long-range movement at low frequency. This generator shows 40 mu W of power output at very low frequency vibration (2 Hz, 0.4 G).
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