Journal
JOURNAL OF MICROMECHANICS AND MICROENGINEERING
Volume 18, Issue 5, Pages -Publisher
IOP PUBLISHING LTD
DOI: 10.1088/0960-1317/18/5/055017
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A microelectromechanical system (MEMS) piezoelectric energy harvesting device, a unimorph PZT cantilever with an integrated Si proof mass, was designed for low vibration frequency and high vibration amplitude environment. Pt/PZT/Pt/Ti/SiO2 multilayered films were deposited on a Si substrate and then the cantilever was patterned and released by inductively coupled plasma reactive ion etching. The fabricated device, with a beam dimension of about 4.800 mm x 0.400 mm x 0.036 mm and an integrated Si mass dimension of about 1.360 mm x 0.940 mm x 0.456 mm produced 160 mV(pk), 2.15 mu W or 3272 mu W cm(-3) with an optimal resistive load of 6 k Omega from 2g (g=9.81 m s(-2)) acceleration at its resonant frequency of 461.15 Hz. This device was compared with other demonstrated MEMS power generators.
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