Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 27, Issue 6, Pages 1082-1088Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2018.2869090
Keywords
Electromechanical sensors; kirigami; microsensors; microfabrication; Parylene C; strain sensors; thin film sensors
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Funding
- U.S. National Science Foundation [EFRI-1332394]
- USC Provost's Fellowship
- Alfred E. Mann Institute Fellowship
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A kirigami-based strategy was investigated for strain transduction, using serpentine gold traces embedded in thin-film Parylene C. Multiple kirigami slit designs were evaluated via COMSOL simulation and mechanical force testing; sensors having tightly packed slits stretched up to 17.5 mm (350% strain) before mechanical failure and 9 mm (180% strain) before electrical failure. Strain transduction was achieved by monitoring DC resistance changes during stretching. DC resistance linearly increased with strain, with sensitivities up to 0.16 Omega/mm (gauge factor = 0.007) and minimal hysteresis. High-frequency trace impedance and inter-trace capacitance were also investigated during strain cycling. Capacitance increased with strain and high-frequency impedance show a nonlinear strain relationship. The biocompatible construction and extremely low profiles (20 mu m thick) of these sensors are attractive for minimally invasive in vivo strain sensing applications.
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