Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 23, Issue 4, Pages 899-907Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2014.2299276
Keywords
Microelectromechanical devices; anemometers; velocity measurement
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Funding
- NSF [CBET-1064257]
- ONR [N00014-09-1-0263]
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The development, fabrication, and characterization of a novel nanoscale thermal anemometry probe (NSTAP) for measuring velocity fluctuations in turbulent flows are described. This miniature MEMS anemometer consists of a freestanding 30 or 60 x 1 x 0.1 mu m platinum filament with electrically conductive pads and a silicon structure. A novel deep reactive ion etching lag-based process for fabricating a 3D silicon support structure is described together with other microfabrication steps. The sensors behave similarly to conventional hot-wire anemometers, with an order of magnitude better spatial and temporal resolution. Batch fabrication allows a relatively low-cost high-yield process, which together with its superior frequency response and size, make it an attractive thermal anemometry sensor for velocity measurements in turbulent flows. [2013-0313]
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