Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 23, Issue 2, Pages 364-371Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2013.2275999
Keywords
Design optimization; MEMS resonators; thermoelastic dissipation; quality factor; particle swarm optimization
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Funding
- DARPA [N660001 12-1-4209]
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The geometry of a slotted MEMS resonator was optimized using a binary particle swarm optimization technique to reduce energy dissipation from thermoelastic dissipation (TED). The optimization technique combines fundamental physics with bio-inspired algorithms to navigate the complicated design space that arises from multiphysical problems. Fully-coupled thermomechanical simulations were used for optimization of Q(TED), and a weakly-coupled approach was used for design analysis. Through this approach, a TED-limited Q of 56 000 was simulated, showing a 40% improvement over previous designs that were generated from the conventional intuitive design approach. The discovery of non-intuitive designs with these techniques also leads to new insight about the behavior of TED. The design algorithm used in this paper can be readily adapted to a variety of MEMS design problems. [2013-0074]
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