4.5 Article

Fabrication of Freestanding 1-D PDMS Microstructures Using Capillary Micromolding

Journal

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 22, Issue 5, Pages 992-994

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2013.2262605

Keywords

BioMEMS; force sensors; cell mechanics

Funding

  1. National Science Foundation [NSF STC CBET-0939511]
  2. National Institutes of Health [NS063405D01]

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A method to create freestanding, biocompatible polydimethylsiloxane (PDMS) microstructures is presented. First, capillary flow through micro channels on silicon (Si) substrates is used to create high fidelity PDMS structures that are a few mu m wide and deep but several mm long (length to width/depth approximate to 500:1). Next, an improvised procedure is employed to remove the cured PDMS microstructures from the Si substrate without damaging them. The method is used to create extremely sensitive cantilever beams with stiffness less than 0.1 pN/mu m, and micro platforms for cell biology studies. The PDMS microstructures created using this method have applications in cell mechanobiology as force and mass sensors. [2013-0106]

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