4.5 Article

A Piezoelectric Parametric Frequency Increased Generator for Harvesting Low-Frequency Vibrations

Journal

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 21, Issue 6, Pages 1311-1320

Publisher

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2012.2205901

Keywords

Frequency up-conversion; low-frequency; parametric frequency increased generator (PFIG); piezoelectric; vibration harvesting; vibration scavenging

Funding

  1. Engineering Research Centers Program of the National Science Foundation [EEC-9986866]
  2. Sandia National Laboratories

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This paper presents the design, fabrication, and testing of a piezoelectric parametric frequency increased generator for harvesting low-frequency non-periodic vibrations. The generator incorporates a bulk piezoelectric ceramic machined using ultrafast laser ablation. The electromechanical transducer is designed as a clamped-clamped spiral beam in order to decrease the stiffness within a limited footprint. An internal mechanism up-converts the ambient vibration frequency to a higher internal operation frequency in order to achieve better electromechanical coupling and efficiency. To gain maximum power output, the optimum width and thickness values of a spiral up-conversion unit are computed via multi-physics finite-element analysis simulations. The fabricated device generated a peak power of 100 mu W and an average power of 3.25 mu W from an input acceleration of 9.8 m/s(2) at 10 Hz. The device operates over a frequency range of 24 Hz. The internal volume of the generator is 1.2 cm(3). [2011-0355]

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