Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 21, Issue 5, Pages 1084-1089Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2012.2203790
Keywords
Electrical stimulation; parylene; penetration; solid needle; 3-D microelectrode array (MEA)
Categories
Funding
- National Basic Research Program of China [2011CB707505]
- National Natural Science Foundation of China [61176111]
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We propose a novel fabrication process to make flexible microneedle electrode array. The process includes creation of a silicon microneedle electrode array using a silicon-on-insulator substrate followed by its release using parylene films as the support material. The proposed structure provides flexibility of a parylene thin film and rigidity of a silicon structure. Using tissue-penetration tests and impedance spectroscopy, we demonstrate that such a structure is promising in invasive neural electrical stimulation and recording.
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