Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 21, Issue 2, Pages 294-301Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2011.2175703
Keywords
Nanomechanical cantilever; organic CantiFET; pentacene organic field-effect transistor (OFET); polymer microcantilever; SU-8; SU-8 dielectric
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Funding
- Department of Information Technology, Government of India, through the Centre of Excellence in Nanoelectronics, Indian Institute of Technology Bombay
- Tata Consultancy Services, India
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Nanomechanical cantilever based biochemical sensors translate molecular interactions into nanomechanical motions that can be measured by different transduction techniques. Improved sensitivity, reliability, and also cost effectiveness of such sensor platforms have been achieved by the use of polymer materials, along with the employment of smart and compatible transduction techniques. This paper explores an ultrasensitive nanomechanical cantilever sensor platform with a novel transduction technique by integrating a strain-sensitive organic field-effect transistor within a polymer nanomechanical cantilever. This sensor, named as organic CantiFET, has a surface stress sensitivity of 401 ppm . [mN/m](-1) with a low-noise floor. This categorizes the organic CantiFET as an efficient biochemical sensor having a minimum detectable surface stress in the range of 0.18 mN/m.
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