Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 20, Issue 3, Pages 702-710Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2011.2140355
Keywords
Force measurement; magnetometers; microelectromechanical devices; navigation; parametric amplifiers
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Funding
- National Science Foundation [ARRA CMMI-084379]
- Directorate For Engineering [0846379] Funding Source: National Science Foundation
- Div Of Civil, Mechanical, & Manufact Inn [0846379] Funding Source: National Science Foundation
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This paper describes a microelectromechanical systems (MEMS) Lorentz force navigation magnetometer whose fabrication is fully compatible with existing foundry processes used to manufacture MEMS inertial sensors. Operating at 1 atm, the magnetometer is shown to have a Brownian-noise-limited field resolution of 87 nT/ root Hz and a corresponding angular resolution of 0.7 degrees / root Hz. To achieve Brownian-noise-limited performance at 1 atm, parametric amplification was performed which amplifies the Lorentz force 40% more than the Brownian noise force and increases the field sensitivity of the device up to 82.5 folds. Here, the parametric signal is also used to perform electromechanical amplitude modulation to mitigate capacitive feedthrough of the drive signal to the sensing electronics. [2010-0229]
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