Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 20, Issue 3, Pages 691-701Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2011.2127453
Keywords
Fabrication; glass; glassblowing; microscale sphere; resonator; spherical shell; vibration; wafer-level micromachining; wineglass mode; 3-D MEMS
Categories
Funding
- NSF [CMMI-0928999]
- DARPA/SPAWAR [N66001-10-1-4074]
- Directorate For Engineering [0928999] Funding Source: National Science Foundation
- Div Of Civil, Mechanical, & Manufact Inn [0928999] Funding Source: National Science Foundation
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This paper introduces a new paradigm for design and batch fabrication of isotropic 3-D spherical shell resonators. The approach uses pressure and surface tension driven plastic deformation (glassblowing) on a wafer scale as a mechanism for creating inherently smooth and symmetric 3-D resonant structures. The feasibility of the new approach was demonstrated by fabrication and characterization of Pyrex glass spherical shell resonators with millimeter-scale diameter and average thickness of 10 mu m. Metal electrodes cofabricated along with the shell were used to actuate the two dynamically balanced four- and six-node vibratory modes. For 1-MHz glass-blown resonators, the relative frequency mismatch Delta f/f between the two degenerate four-node wineglass modes was measured as 0.63% without any trimming or tuning. For the higher order six-node wineglass modes, the relative frequency mismatch was only 0.2%, demonstrating the potential for precision manufacturing. The intrinsic manufacturing symmetry enabled by the technology may inspire new classes of high-performance 3-D MEMS for communication and inertial navigation. [2010-0268]
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