Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 19, Issue 6, Pages 1352-1361Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2010.2076791
Keywords
Biomimetic; contact sensor; electrochemical microelectromechanical systems (EC-MEMS); EC sensing; EC transduction; electrolysis actuation; force sensor; impedance-based sensor; liquid encapsulation; liquid impedance; mechanotransduction; Parylene C
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Funding
- National Science Foundation (NSF) [EEC-0310723, ECS-0547544]
- Bill and Melinda Gates Foundation
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We report the design, fabrication, and characterization of electrochemical microelectromechanical systems (EC-MEMS) devices featuring encapsulated fluid as the basis for transduction. Parylene microstructures, including discrete chambers (square or circular geometry), are utilized as physical transducers for electrochemically mediated liquid impedance transduction of physical phenomenon such as contact and force. Parylene-based EC-MEMS technologies uniquely leverage advantages in size (< 500 mu m diameter), packaging (no hermetic packaging necessary), power (nanowatts to microwatts), and flexibility to address the physical sensing requirements of in vivo applications. Robust EC impedance (EI) sensor responses (up to 20% from base-line) and discrimination of 200-nm chamber deflections were possible using the EI transduction technique. Additional transducer configurations enabling electrolysis-based out-of-plane actuation and biomimetic mechanotransduction in microfluidic channels are also presented.
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