Journal
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS
Volume 19, Issue 3, Pages 675-682Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/JMEMS.2010.2046014
Keywords
In situ; microdevices; nanoindenter; nanomanipulation; nanomechanics
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Funding
- National Science Foundation [NSF ECCS 0702766, CMMI 0800896]
- Air Force Research Laboratory [FA8650-07-2-5061]
- Air Force Office of Sponsored Research Young Investigator Program [FA9550-09-1-0084]
- James L. Record Chair
- Div Of Civil, Mechanical, & Manufact Inn
- Directorate For Engineering [0800896] Funding Source: National Science Foundation
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We report on the development and application of a silicon microdevice for the in situ quantitative mechanical characterization of single 1-D nanomaterials within a scanning electron microscope equipped with a quantitative nanoindenter. The design makes it possible to convert a compressive nanoindentation force applied to a shuttle to uniaxial tension on a specimen attached to a sample stage. Finite-element analysis and experimental calibration have been employed to extract the specimen stress versus strain curve from the indentation load versus displacement curve. The stress versus strain curves for three 200-300-nm-diameter Ni nanowire specimens are presented and analyzed.
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