Dynamic analysis of a linear motion guide having rolling elements for precision positioning devices

Linear motion (LM) guides supported by rolling elements can be used to ultra-accurately position precision machines. For accurate positioning, the micro and macro dynamic behavior of the LM guide must be understood, but the research on this subject is rather limited. In this investigation, experiments to reveal the dynamic characteristics of the LM guide were performed and a simplified model to predict the observed dynamics of the LM guide was developed. Several experiments conducted in the present research demonstrated the hysteretic behavior as well as frequency- and force-dependent phenomena of the LM guide. The validity of the proposed modeling method was checked with theoretical and numerical analyses.