Journal
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
Volume 20, Issue -, Pages 290-293Publisher
SPRINGER
DOI: 10.1007/s10854-008-9584-6
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In this paper we study the possibility to realise surface relief gratings in thin chalcogenide glass films by holographic exposure using a pulsed KrF excimer laser. Gratings with a period of 540 nm and depths of 100-300 nm were patterned at the surface of 1 mu m thick films. Due to coupling of an incident near-infrared laser beam to waveguide modes a resonance-like polarisation dependent decline of transmission was observed at specific incidence angles. Just one laser pulse with a fluence of 12 mJ/cm(2) per beam was sufficient to achieve the required grating parameters in sulphide glasses with low T (g).
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