Direct fabrication of surface relief gratings in chalcogenide glasses by excimer laser interference lithography

In this paper we study the possibility to realise surface relief gratings in thin chalcogenide glass films by holographic exposure using a pulsed KrF excimer laser. Gratings with a period of 540 nm and depths of 100-300 nm were patterned at the surface of 1 mu m thick films. Due to coupling of an incident near-infrared laser beam to waveguide modes a resonance-like polarisation dependent decline of transmission was observed at specific incidence angles. Just one laser pulse with a fluence of 12 mJ/cm(2) per beam was sufficient to achieve the required grating parameters in sulphide glasses with low T (g).