Journal
JOURNAL OF MATERIALS SCIENCE & TECHNOLOGY
Volume 29, Issue 7, Pages 655-661Publisher
JOURNAL MATER SCI TECHNOL
DOI: 10.1016/j.jmst.2013.03.017
Keywords
SiC; Photo-electrochemical etching; Porous patterning
Funding
- National Basic Research Program of China [2011CB301904, 2009CB930503]
- National Natural Science Foundation of China [51021062, 11134006]
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Hierarchical porous patterns have been fabricated on the C face, Si face, and cross section of n-type 6H-SiC crystal via photo-electrochemical etching using HFC2H5OH and HFH2O2 as electrolytes. The porous layer displayed multiple and multiscale microstructures on different faces, including stalactite-like, sponge-like and dendritic porous structures on C face, echinoid micro-patterns on Si face, and columnar and keel-shaped micro-patterns on the cross section. The formation of hierarchical porous pattern is ascribed to the dynamic competition balance between the electrochemical oxidation rate and the oxide removal rate. It was found that increasing the ionic strength of the electrolyte can obviously disturb the surface morphology of the porous SiC during the photo-electrochemical etching. Possible mechanisms for selective etching were further discussed.
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