Journal
JOURNAL OF MATERIALS RESEARCH
Volume 24, Issue 11, Pages 3338-3342Publisher
CAMBRIDGE UNIV PRESS
DOI: 10.1557/JMR.2009.0417
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Funding
- National Science Foundation (NSF) [CMS-0556169, ECS-0335765]
- Materials Research Science and Engineering Center (MRSEC) at Harvard University
- Korea government (MOST) [R11-2005-065, KRF-2009-0069545]
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For a flexible electronic device integrating inorganic materials on a polymer substrate, the polymer can deform substantially, but the inorganic materials usually fracture at small strains. This paper describes an approach to make such a device highly stretchable. A polyimide substrate is first coated with a thin layer of an elastomer, on top of which SiNx islands are fabricated. When the substrate is stretched to a large strain, the SiNx islands remain intact. Calculations confirm that the elastomer reduces the strain in the SiNx islands by orders of magnitude.
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