4.6 Article Proceedings Paper

Application of ion irradiation for surface finish of micro-forming die

Journal

JOURNAL OF MATERIALS PROCESSING TECHNOLOGY
Volume 201, Issue 1-3, Pages 315-318

Publisher

ELSEVIER SCIENCE SA
DOI: 10.1016/j.jmatprotec.2007.11.210

Keywords

micro-press forming; high-energy ion beam; surface roughness

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Fabrication and surface treatment of die are important issues for micro-metal forming. Ion beam irradiation was applied as a new process for surface finish of micro-die after the machining in this paper. Ar ion plasma by electron cyclone resonance (ECR) equipment was utilized for the irradiation process. Roughness and mechanical properties (Young's modulus and hardness) of the surface was measured by using a confocal scanning laser microscope and a nanoindentation, respectively Furthermore, durability of the die was evaluated through a piercing test on a press machine. Experimental results show that the ion irradiation is very effective to reduce the surface roughness due to the machining process. The durability was improved corresponding to reduction of surface roughness. (C) 2007 Elsevier B.V. All rights reserved.

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