Journal
JOURNAL OF MATERIALS CHEMISTRY
Volume 20, Issue 24, Pages 5041-5046Publisher
ROYAL SOC CHEMISTRY
DOI: 10.1039/c0jm00509f
Keywords
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Funding
- Oregon Nanoscience and Micro-technologies Institute (ONAMI)
- NIH [2R15GM066279, R01GM080295, R01GM080295S1, P41EB002027]
- ONR [N00014-08-1-1237]
- NATIONAL INSTITUTE OF BIOMEDICAL IMAGING AND BIOENGINEERING [P41EB002027] Funding Source: NIH RePORTER
- NATIONAL INSTITUTE OF GENERAL MEDICAL SCIENCES [R01GM080295, R15GM066279] Funding Source: NIH RePORTER
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Producing large-scale graphene films with controllable patterns is an essential component of graphene-based nanodevice fabrication. Current methods of graphene pattern preparation involve either high cost, low throughput patterning processes or sophisticated instruments, hindering their large-scale fabrication and practical applications. We report a simple, effective, and reproducible approach for patterning graphene films with controllable feature sizes and shapes. The patterns were generated using a versatile photocoupling chemistry. Features from micrometres to centimetres were fabricated using a conventional photolithography process. This method is simple, general, and applicable to a wide range of substrates including silicon wafers, glass slides, and metal films.
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