Journal
JOURNAL OF MATERIAL CYCLES AND WASTE MANAGEMENT
Volume 18, Issue 2, Pages 366-376Publisher
SPRINGER
DOI: 10.1007/s10163-014-0339-6
Keywords
Waste solvent recovery; Photoresist stripper; Distillation sequence; Waste solvent treatment; HEP (1-hydroxyethylpiperazine); MDG (methyl diglycol)
Categories
Funding
- R&D Center for Valuable Recycling (Global-Top Environmental Technology Development Program) - Ministry of Environment [11-A13-OD]
- Priority Research Centers Program through the National Research Foundation of Korea (NRF) - Ministry of Education [2014 R1A6A1031189]
- Korea Environmental Industry & Technology Institute (KEITI) [11-A13-OD] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
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Currently, waste photoresist stripper from the semiconductor industries is generally incinerated at high temperatures or processed as a high-calorie fuel, which can have adverse effects on the environment and economy. Recovery of valuable solvents from waste photoresist strippers is, therefore, very important for thin flat transistor-liquid crystal display (TFT-LCD) manufactures to reduce the production costs and protect the environment against industrial waste. In the present work, systematic laboratory-scale distillation experiments were carried out to regenerate the organic solvents from the waste photoresist stripper and determine if they are feasible to recycle for commercial TFT-LCD grade chemicals: in particular, 1-hydroxyethylpiperazine and methyl diglycol were mainly tried to retrieve. Based on the experiment results, possible alternative distillation sequences were examined through intensive techno-economic analysis using a rigorous process simulator. As a result, an optimal distillation sequence and condition were drawn to separate valuable organic solvents from waste photoresist stripper for a commercial purpose recovery process.
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