4.0 Article

Control of Surface Shape in Nanostructure Formed with Femtosecond Laser Pulses

Journal

JOURNAL OF LASER MICRO NANOENGINEERING
Volume 5, Issue 1, Pages 86-89

Publisher

JAPAN LASER PROCESSING SOC
DOI: 10.2961/jlmn.2010.01.0018

Keywords

Femtosecond laser ablation; nanostructuring; local field; diamondlike carbon

Funding

  1. Murata Science Foundation [A81158]
  2. [18206010]
  3. [20760033]

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This paper reports the experimental results demonstrating that the nanostructured surface of diamondlike carbon film can be shaped so as to have a sawlike pattern with obliquely incident p-polarized femtosecond laser pulses. The nanoscale surface shape was observed as functions of incident angle, superimposed number and fluence of laser pulses and characterized with height and slope angle of the inclined surface. This results show that the inclined shape is formed with the non-uniform spatial distribution of local field enhanced on the nanostructured surface.

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