Journal
JOURNAL OF LASER MICRO NANOENGINEERING
Volume 5, Issue 1, Pages 86-89Publisher
JAPAN LASER PROCESSING SOC
DOI: 10.2961/jlmn.2010.01.0018
Keywords
Femtosecond laser ablation; nanostructuring; local field; diamondlike carbon
Categories
Funding
- Murata Science Foundation [A81158]
- [18206010]
- [20760033]
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This paper reports the experimental results demonstrating that the nanostructured surface of diamondlike carbon film can be shaped so as to have a sawlike pattern with obliquely incident p-polarized femtosecond laser pulses. The nanoscale surface shape was observed as functions of incident angle, superimposed number and fluence of laser pulses and characterized with height and slope angle of the inclined surface. This results show that the inclined shape is formed with the non-uniform spatial distribution of local field enhanced on the nanostructured surface.
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