Laser ablation via programmable image projection for submicron dimension machining in diamond

A digital micromirror device is used as an intensity spatial light modulator, in conjunction with a femtosecond laser, for programmable image-projection-based laser ablation of polycrystalline diamond. Results show the machining of complex structures on the diamond surface, where individual structures have submicron features, covering a total area of 10 x 10 mu m and fabricated using ten laser pulses. This dynamic image-based machining technique may offer speed advantages over serial-writing procedures, whilst still producing wavelength-scale feature sizes. (C) 2014 Laser Institute of America.