Journal
JOURNAL OF LASER APPLICATIONS
Volume 24, Issue 4, Pages -Publisher
AMER INST PHYSICS
DOI: 10.2351/1.4712151
Keywords
laser materials processing; two-photon polymerization; nanostructures; subwavelength structures; sol-gel; Photosensitive materials; ultrafast technology; resolution; white light interference; fourier scatterometry; sensitivity analysis
Funding
- German DFG [SPP1327]
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Investigations of two-photon polymerization (TPP) with sub-100 nm in the structuring resolution are presented by using photosensitive sol-gel material. The high photosensitivity of this material allows for TPP using a large variety in laser pulse durations covering a range between sub-10 fs and approximate to 140 fs. In this study, the authors demonstrate TPP structuring to obtain sub-100 nm in resolution by different approaches, namely, by adding a cross-linker to the material and polymerization with sub-10 fs short pulses. Additionally, a simulation and model based characterization method for periodic sub-100 nm structures was implemented and applied in an experimental white light interference Fourier-Scatterometry setup. (C) 2012 Laser Institute of America.
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