Journal
OPTICS EXPRESS
Volume 23, Issue 18, Pages 23072-23078Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.23.023072
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Funding
- 973 programs [2011CB922003, 2013CB328702]
- NSFC [11374165, 11174153, 10804054]
- 111 Project [B07013]
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Lithium niobate (LN) microdisk resonators on a LN-silica-LN chip were fabricated using only conventional semiconductor fabrication processes. The quality factor of the LN resonator with a 39.6-mu m radius and a 0.5-mu m thickness is up to 1.19x10(6), which doubles the record of the quality factor 4.84x10(5) of LN resonators produced by microfabrication methods allowing batch production. Electro-optic modulation with an effective resonance-frequency tuning rate of 3.0 GHz/V was demonstrated in the fabricated LN microdisk resonator. (C) 2015 Optical Society of America
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