Microfluidic flowmeter based on micro hot-wire sandwiched Fabry-Perot interferometer

We present a compact microfluidic flowmeter based on FabryPerot interferometer (FPI). The FPI was composed by a pair of fiber Bragg grating reflectors and a micro Co2+-doped optical fiber cavity, acting as a hot-wire sensor. Microfluidic channels made from commercial silica capillaries were integrated with the FPIs on a chip to realize flow-rate sensing system. By utilizing a tunable pump laser with wavelength of 1480 nm, the proposed flowmeter was experimentally demonstrated. The flow rate of the liquid sample is determined by the induced resonance wavelength shift of the FPI. The effect of the pump power, microfluidic channel scale and temperature on the performance of our flowmeter was investigated. The dynamic response was also measured under different flow-rate conditions. The experimental results achieve a sensitivity of 70 pm/(mu L/s), a dynamic range up to 1.1 mu L/s and response time in the level of seconds, with a spatial resolution similar to 200 mu m. Such good performance renders the sensor a promising supplementary component in microfluidic biochemical sensing system. Furthermore, simulation modal was built up to analyze the heat distribution of the hot-wire cavity and optimize the FPI structure as well. (C) 2015 Optical Society of America