Journal
OPTICS EXPRESS
Volume 23, Issue 3, Pages 3196-3208Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.23.003196
Keywords
-
Categories
Funding
- DARPA MESO program
- AFOSR Hybrid Nanophotonics MURI
- Institute for Quantum Information and Matter, an NSF Physics Frontiers Center
- Gordon and Betty Moore Foundation
- Kavli Nanoscience Institute at Caltech
- EU [GA 298861]
- ERC
Ask authors/readers for more resources
We fabricate and characterize a microscale silicon opto-electro-mechanical system whose mechanical motion is coupled capacitively to an electrical circuit and optically via radiation pressure to a photonic crystal cavity. To achieve large electromechanical interaction strength, we implement an inverse shadow mask fabrication scheme which obtains capacitor gaps as small as 30 nm while maintaining a silicon surface quality necessary for minimizing optical loss. Using the sensitive optical read-out of the photonic crystal cavity, we characterize the linear and nonlinear capacitive coupling to the fundamental omega(m)/2 pi - 63 MHz in-plane flexural motion of the structure, showing that the large electromechanical coupling in such devices may be suitable for realizing efficient microwave-to-optical signal conversion. (C) 2015 Optical Society of America
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available