Journal
OPTICS EXPRESS
Volume 23, Issue 9, Pages 11771-11782Publisher
OPTICAL SOC AMER
DOI: 10.1364/OE.23.011771
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Funding
- National Institutes of Health (NIH) [5R21GM104665]
- NIH [T32EB000809]
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A method to design one-dimensional beam-spitting phase gratings with low sensitivity to fabrication errors is described. The method optimizes the phase function of a grating by minimizing the integrated variance of the energy of each output beam over a range of fabrication errors. Numerical results for three 1x9 beam splitting phase gratings are given. Two optimized gratings with low sensitivity to fabrication errors were compared with a grating designed for optimal efficiency. These three gratings were fabricated using gray-scale photolithography. The standard deviation of the 9 outgoing beam energies in the optimized gratings were 2.3 and 3.4 times lower than the optimal efficiency grating. (C) 2015 Optical Society of America
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