Quantitative assessment of touch-screen panel by nondestructive inspection with three-dimensional real-time display optical coherence tomography

We investigated the use of optical coherence tomography (OCT) to measure several materials immersed in optical adhesives. The effects of variations in the concentration, physical characteristics, and thickness of the materials were studied, and these parameters were found to significantly affect the OCT measurement. The materials were selected for their distinct spectral properties in the infrared region. To ensure reliability, we acquired images using a scanning electron microscope after performing the semiconductor production process. We verified the feasibility of the application of OCT for defect inspection and product verification of touch-screen panels. (C) 2014 Elsevier Ltd. All rights reserved.