Journal
OPTICAL MATERIALS
Volume 50, Issue -, Pages 167-174Publisher
ELSEVIER
DOI: 10.1016/j.optmat.2015.10.017
Keywords
Porous silica; Micro-resonator; Ridge waveguides
Categories
Funding
- NORCAP project - French Research Ministry
- FOCUS project - French Research Ministry
- ARED - Conseil General des Cotes d'Armor
- Region Bretagne
Ask authors/readers for more resources
The fabrication of micro-resonators, made from porous silica ridge waveguides by using an electrochemical etching method of silicon substrate followed by thermal oxidation and then by a standard photolithography process, is reported. The design and fabrication process are described including a study of waveguide dimensions that provide single mode propagation and calculation of the coupling ratio between a straight access waveguide and the racetrack resonator. Scanning electronic microscopy observations and optical characterizations clearly show that the micro-resonator based on porous silica ridge waveguides has been well implemented. This porous micro-resonator is destined to be used as an optical sensor. The porous nature of the ridge waveguide constitutes the detection medium which will enhance the sensor sensitivity compared to usual micro-resonators based on the evanescent wave detection. A theoretical sensitivity of 1170 nm per refractive index unit has been calculated, taking into consideration experimental data obtained from the optical characterizations. (C) 2015 Elsevier B.V. All rights reserved.
Authors
I am an author on this paper
Click your name to claim this paper and add it to your profile.
Reviews
Recommended
No Data Available