4.5 Article

Thin Film Deposition of Semiconducting Ni-Co Oxide Spinel with Adequate Electrical and Optical Properties for Energy Application

Journal

JOURNAL OF ELECTRONIC MATERIALS
Volume 43, Issue 7, Pages 2584-2587

Publisher

SPRINGER
DOI: 10.1007/s11664-014-3144-z

Keywords

Conducting; oxides; spinel; sputtering

Funding

  1. National Science Council in Taiwan [NSC102-3113-P-008 -001]

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Nickel-cobalt oxide with spinel structure was successfully fabricated using a wet chemical route followed by calcinations at 300 A degrees C. In nickel-cobalt spinel oxide, Ni2+ ions occupy the octahedral sites and Co3+ ions are distributed over both octahedral and tetrahedral sites. Very interestingly, nickel-cobalt spinel oxide does not only show a p-type semi-conducting behavior material but also exhibits desired transparency in infrared wavelengths. Electrical and optical properties of the deposited films were investigated as a function of different processing conditions. The sputtering target is fabricated by homogeneously mixing oxide powders and followed by sintering at 1,500 A degrees C. The nickel-cobalt oxide film showed a resistivity as low as 10(-2) Omega-cm by radio frequency (RF) magnetron sputtering in a pure oxygen atmosphere. The sputter-deposited nickel-cobalt oxide films also showed more than 70% transmittance in the infrared range.

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