4.4 Article

Overview of electroceramic materials for oxide semiconductor thin film transistors

Journal

JOURNAL OF ELECTROCERAMICS
Volume 32, Issue 2-3, Pages 117-140

Publisher

SPRINGER
DOI: 10.1007/s10832-013-9858-0

Keywords

Electroceramics; Oxide semiconductors; Transistors; Displays; Gate insulators

Funding

  1. Development Program of Manufacturing Technology for Flexible Electronics with High Performance - Korea Institute of Machinery and Materials (KIMM) [SC0970]
  2. National Research Foundation of Korea (NRF) - Korea government (MEST) [2012011730]
  3. IT R&D program of MKE/KEIT [10041416]
  4. Center for Integrated Smart Sensors - Ministry of Science, ICT & Future Planning as Global Frontier Project [CISS-2012M3A6A6054188]
  5. Korea Communications Agency (KCA) [R0101-14-0133] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)
  6. National Research Foundation of Korea [2011-0031870, 2012R1A2A2A02011730] Funding Source: Korea Institute of Science & Technology Information (KISTI), National Science & Technology Information Service (NTIS)

Ask authors/readers for more resources

The flat panel display (FPD) market has been experiencing a rapid transition from liquid crystal (LC) to organic light emitting diode (OLED) displays, leading, in turn, to the accelerated commercialization of OLED televisions already in 2013. The major driving force for this rapid change was the adaptation of novel oxide semiconductor materials as the active channel layer in thin film transistors (TFTs). Since the report of amorphous-InGaZnO (a-IGZO) semiconductor materials in 2004, the FPD industry has accelerated the development of oxide TFTs for mass-production. In this review, we focus on recent progress in applying electro-ceramic materials for oxide-semiconductor thin-film-transistors. First, oxide-based semiconductor materials, distinguished by vacuum or solution processing, are discussed, with efforts to develop high-performance, cost-effective devices reviewed in chronological order. The introduction and role of high dielectric constant - reduced leakage gate insulators, in optimizing oxide-semiconductor device performance, are next covered. We conclude by discussing current issues impacting oxide-semiconductor TFTs, such as field effect mobility and device stability and the proposed directions being taken to address them.

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