4.3 Article

Formation of definite GaN p-n junction by Mg-ion implantation to n--GaN epitaxial layers grown on a high-quality free-standing GaN substrate

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ELSEVIER
DOI: 10.1016/j.nimb.2015.07.095

Keywords

GaN; P-type GaN; Mg-ion implantation; Free-standing GaN substrate

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P-type conversion of n(-)-GaN by Mg-ion implantation was successfully performed using high quality GaN epitaxial layers grown on free-standing low-dislocation-density GaN substrates. These samples showed low-temperature PL spectra quite similar to those observed from Mg-doped MOVPE-grown p-type GaN, consisting of Mg related donor-acceptor pair (DAP) and acceptor bound exciton (ABE) emission. P-n diodes fabricated by the Mg-ion implantation showed clear rectifying I-V characteristics and UV and blue light emissions were observed at forward biased conditions for the first time. (C) 2015 Elsevier B.V. All rights reserved.

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