Journal
JOURNAL OF COMPOSITE MATERIALS
Volume 49, Issue 2, Pages 199-207Publisher
SAGE PUBLICATIONS LTD
DOI: 10.1177/0021998313515291
Keywords
Metal doped diamond-like carbon films; magnetron sputtering; internal stress; hardness; friction and wear
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Funding
- Natural Science Foundation of China [51105352, 51305433]
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Al-diamond-like carbon films were successfully deposited by the reactive magnetron sputtering of Al target (>99.9%) in the argon and methane gas mixture atmosphere under selected substrate negative bias with high pulse cycle duty (50%). The microstructure, mechanical and tribological properties of the as-prepared Al-diamond-like carbon films were investigated. Results showed that these films were dominated by the typical amorphous structure, and the internal stress of films dramatically decreased while the hardness remained a high level (approximate to 20GPa) with increasing substrate pulse negative bias. Especially, the Al-diamond-like carbon film fabricated at substrate bias of -500V displayed a longer wear life and lower friction coefficient due to both itself superior mechanical properties and the formation of continuous and compact graphitized transfer layer, making it a good candidate for solid lubricating film in engineering applications.
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