Life cycle assessment of DRAM in Taiwan's semiconductor industry

The semiconductor industry plays a leading role in supporting economic stabilization and social progress in Taiwan. In this paper, Eco-indicator 95 and Impact 2002+ are utilized to evaluate the potential environmental impacts from five production processes of the double data rate synchronous dynamic random access memory (DDR SDRAM). The comparisons between these two impact methods and their scopes are also discussed. From our results, global warming potential and non-renewable energy consumption were identified as the major environmental impacts. Applications of Eco-indicator 95 and IMPACT 2002+ also suggest that summer smog and respiratory inorganics are significant impact categories. The comparison of the scopes of these two methods identifies that low GWP potential PFCs substitution and electricity saving are effective ways to decrease environmental impacts of DRAM manufacturing. In addition, IMPACT 2002+ is a more applicable LCA method for the semiconductor industry in Taiwan due to the structure and reference area of this method and the characteristics of the semiconductor industry in Taiwan. (C) 2009 Elsevier Ltd. All rights reserved.