Journal
JOURNAL OF APPLIED PHYSICS
Volume 113, Issue 4, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.4789597
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Funding
- Swedish Foundation for Strategic Research
- Nordforsk [9046]
- Nordic Innovation Centre [09046]
- Swedish Research Council (VR) through LiLi-NFM Strong Research Environment and Project [621-2009-5258]
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We report the synthesis by reactive magnetron sputtering and structural characterization of highly (111)-oriented thin films of delta-Bi2O3. This phase is obtained at a substrate temperature of 150-200 degrees C in a narrow window of O-2/Ar ratio in the sputtering gas (18%-20%). Transmission electron microscopy and x-ray diffraction reveal a polycrystalline columnar structure with (111) texture. The films are stable from room temperature up to 250 degrees C in vacuum and 350 degrees C in ambient air. (C) 2013 American Institute of Physics. [http://dx.doi.org/10.1063/1.4789597]
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