Journal
JOURNAL OF APPLIED PHYSICS
Volume 111, Issue 3, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3673593
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Funding
- National Research Foundation (Singapore)
- CSIRO's OCE Science Leadership Scheme
- Australian Research Council (Australia)
- National Natural Science Foundation of China [90 923 005]
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An advanced inductively coupled plasma (ICP)-assisted rf magnetron sputtering deposition method is developed to synthesize regular arrays of pear-shaped ZnO nanodots on a thin SiNx buffer layer pre-deposited onto a silicon substrate. It is shown that the growth of ZnO nanodots obey the cubic root-law behavior. It is also shown that the synthesized ZnO nanodots are highly-uniform, controllable by the experimental parameters, and also feature good structural and photoluminescent properties. These results suggest that this custom-designed ICP-based technique is very effective and highly-promising for the synthesis of property- and size-controllable highly-uniform ZnO nanodots suitable for next-generation light emitting diodes, energy storage, UV nanolasers, and other applications. (C) 2012 American Institute of Physics. [doi:10.1063/1.3673593]
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