Journal
JOURNAL OF APPLIED PHYSICS
Volume 110, Issue 2, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3610513
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- VR FBAR of the Swedish Research Council [2009-3460]
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Tunable 5.2 GHz bulk acoustic wave resonators utilizing BaxSr1-xTiO3 ferroelectric films with similar intrinsic properties but different interface roughness are fabricated and characterized. Increase in roughness from 3.2 nm up to 6.9 nm results in reduction in Q-factor from 350 down to 150 due to extrinsic acoustic losses caused by wave scattering at reflections from rough interfaces and other mechanisms associated with roughness. The increased roughness is a result of distortion of Pt bottom electrode caused by formation of heterogeneous enclosures of TiO2-x in the Pt layer. (C) 2011 American Institute of Physics. [doi: 10.1063/1.3610513]
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