Journal
JOURNAL OF APPLIED PHYSICS
Volume 109, Issue 5, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3553395
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Funding
- PNCDI [540/2009]
- French Research Agency
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Pulsed systems are extensively used to produce active species such as atoms, radicals, excited states, etc. The tunable diode laser absorption spectroscopy (TD-LAS) is successfully used to quantify the density of absorbing species, but especially for stationary or slow changing systems. The time resolved-direct absorption profile (TR-DAP) measurement method by TD-LAS, with time resolution of mu s is proposed here as an extension of the regular use of diode laser absorption spectroscopy. The spectral narrowness of laser diodes, especially in the blue range (similar to 0.01 pm), combined with the nanosecond fast trigger of the magnetron pulsed plasma and long trace recording on the oscilloscope (period of second scale) permit the detection of the sputtered titanium metal evolution in the afterglow (similar to ms). TR-DAP method can follow the time-dependence of the temperature (Doppler profile) and the density (deduced from the absorbance) of any medium and heavy species in a pulsed system. (C) 2011 American Institute of Physics. [doi:10.1063/1.3553395]
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