Journal
JOURNAL OF APPLIED PHYSICS
Volume 107, Issue 2, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.3294960
Keywords
adhesion; elemental semiconductors; graphene; multilayers; nanoparticles; scanning electron microscopy; silicon
Categories
Funding
- Div Of Civil, Mechanical, & Manufact Inn
- Directorate For Engineering [0757140] Funding Source: National Science Foundation
- Div Of Engineering Education and Centers
- Directorate For Engineering [832785] Funding Source: National Science Foundation
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We report a technique to characterize adhesion of monolayered/multilayered graphene sheets on silicon wafer. Nanoparticles trapped at graphene-silicon interface act as point wedges to support axisymmetric blisters. Local adhesion strength is found by measuring the particle height and blister radius using a scanning electron microscope. Adhesion energy of the typical graphene-silicon interface is measured to be 151 +/- 28 mJ/m(2). The proposed method and our measurements provide insights in fabrication and reliability of microelectromechanical/nanoelectromechanical systems.
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