Journal
JOURNAL OF APPLIED PHYSICS
Volume 106, Issue 8, Pages -Publisher
AIP Publishing
DOI: 10.1063/1.3225103
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Funding
- Japan Society for the Promotion of Science, Japan [20760027]
- Ministry of Education, Culture, Sports, Science and Technology, Japan
- Grants-in-Aid for Scientific Research [20760027] Funding Source: KAKEN
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Although scanning confocal electron microscopy (SCEM) shows a promise for optical depth sectioning with high resolution, practical and theoretical problems have prevented its application to three-dimensional (3D) imaging. We employed a stage-scanning system in which only the specimen is moved three dimensionally under a fixed lens configuration, and an annular dark-field (ADF) aperture which blocks direct beams and selects only the scattered electrons. This ADF-SCEM improved depth resolution sufficiently to perform optical depth sectioning. Finally, we succeeded in demonstrating the 3D reconstruction of carbon nanocoils using ADF-SCEM. (C) 2009 American Institute of Physics. [doi:10.1063/1.3225103]
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