Journal
JOURNAL OF APPLIED PHYSICS
Volume 103, Issue 7, Pages -Publisher
AMER INST PHYSICS
DOI: 10.1063/1.2837661
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Low frequency 1/f noise in magnetoresistive (MR) spin valve sensors was suppressed by modulating an external dc magnetic field at high frequency microelectromechanical system using a (MEMS) microcantilever structure with an integrated magnetic flux guide. With this hybrid MR/MEMS device, direct detection of dc magnetic fields in the sensor high frequency thermal noise regime was achieved. The microcantilever was actuated using a gate electrode by applying an ac voltage with frequency f, causing it to oscillate at 2f. Measurements show detection of a dc magnetic field at 2f frequency (400 kHz), where sensor 1/f noise is two orders of magnitude lower than dc. (C) 2008 American Institute of Physics.
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