Related references
Note: Only part of the references are listed.Origins of ion energy distribution function (IEDF) in high power impulse magnetron sputtering (HIPIMS) plasma discharge
A. Hecimovic et al.
JOURNAL OF PHYSICS D-APPLIED PHYSICS (2008)
Deposition of nanoscale multilayer CrN/NbN physical vapor deposition coatings by high power impulse magnetron sputtering
Y. P. Purandare et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2008)
Plasma dynamic in chromium and titanium HIPIMS discharges
Alena Vetushka et al.
JOURNAL OF PHYSICS D-APPLIED PHYSICS (2008)
Time-Resolved Ionisation Studies of the High Power Impulse Magnetron Discharge in Mixed Argon and Nitrogen Atmosphere
Arutiun P. Ehiasarian et al.
PLASMA PROCESSES AND POLYMERS (2007)
CrAlYN/CrN superlattice coatings deposited by the combined high power impulse magnetron sputtering/unbalanced magnetron sputtering technique
P. Eh. Hovsepian et al.
SURFACE & COATINGS TECHNOLOGY (2006)
The ion energy distributions and ion flux composition from a high power impulse magnetron sputtering discharge
J. Bohlmark et al.
THIN SOLID FILMS (2006)
Study of the transport of titanium neutrals and ions in the post-discharge of a high power pulsed magnetron sputtering device
Ludovic de Poucques et al.
PLASMA SOURCES SCIENCE & TECHNOLOGY (2006)
Transport of ionized metal atoms in high-power pulsed magnetron discharges assisted by inductively coupled plasma
S Konstantinidis et al.
APPLIED PHYSICS LETTERS (2006)
Influence of pulse duration on the plasma characteristics in high-power pulsed magnetron discharges
S Konstantinidis et al.
JOURNAL OF APPLIED PHYSICS (2006)
Ionization of sputtered metals in high power pulsed magnetron sputtering
J Bohlmark et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A (2005)
Measurement of ionic and neutral densities in amplified magnetron discharges by pulsed absorption spectroscopy
S Konstantinidis et al.
JOURNAL OF APPLIED PHYSICS (2004)
Pulsed dc magnetron discharges and their utilization in plasma surface engineering
J Vlcek et al.
CONTRIBUTIONS TO PLASMA PHYSICS (2004)
High power pulsed magnetron sputtered CrNx films
AP Ehiasarian et al.
SURFACE & COATINGS TECHNOLOGY (2003)
Spatial and temporal behavior of the plasma parameters in a pulsed magnetron discharge
JT Gudmundsson et al.
SURFACE & COATINGS TECHNOLOGY (2002)
Influence of high power densities on the composition of pulsed magnetron plasmas
AP Ehiasarian et al.
VACUUM (2002)
A periodic table of ion charge-state distributions observed in the transition region between vacuum sparks and vacuum arcs
A Anders
IEEE TRANSACTIONS ON PLASMA SCIENCE (2001)
Ionized sputter deposition using an extremely high plasma density pulsed magnetron discharge
K Macák et al.
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS (2000)
Share Paper
